JPH02137031U - - Google Patents
Info
- Publication number
- JPH02137031U JPH02137031U JP4312589U JP4312589U JPH02137031U JP H02137031 U JPH02137031 U JP H02137031U JP 4312589 U JP4312589 U JP 4312589U JP 4312589 U JP4312589 U JP 4312589U JP H02137031 U JPH02137031 U JP H02137031U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- chemical liquid
- liquid bottle
- piping
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4312589U JPH02137031U (en]) | 1989-04-13 | 1989-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4312589U JPH02137031U (en]) | 1989-04-13 | 1989-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02137031U true JPH02137031U (en]) | 1990-11-15 |
Family
ID=31555275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4312589U Pending JPH02137031U (en]) | 1989-04-13 | 1989-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02137031U (en]) |
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1989
- 1989-04-13 JP JP4312589U patent/JPH02137031U/ja active Pending